Applications from Schunk Xycarb Technology

Suitable products for your application

Edge Ring and Wafer Support Cylinder for RTP Equipment, RTP Lamps

Infrared Lamps for EPI and RTP applications, RTP, 8” RTP: AMAT Centura XE & Radiance

Edge Ring, Edge Ring flat type wafer, Adapter Ring (6”), Edge Ring thin, Wafer Support Cylinder,
12” RTP: AMAT Radiance (+)

RTP RadiancePlus chamber (Vantage), Edge ring uni oxidized, Wafer support cylinder, ATM quartz disk (RE needed), 12” RTP: AMAT Radiance (+)

RTP Radiance chamber (Centura), Edge ring silicon coated, Wafer Support Cylinder, ATM quartz disk