Schunk Xycarb Technology

Pure Excellence in Graphite, Ceramics and Quartzware solutions for Microelectronic applications

Pushing the technical boundaries

As leading global supplier to the semiconductor, LED, FPD, and solar wafer processing industries, Schunk Xycarb Technology operates to the highest industry standards, delivering what we believe in: Pure Excellence.

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Through high machining accuracy and Schunk Xycarb Technology’s own developed unique CVD SiC coating process our customers have the benefit of reliable parts with consistent performance: within wafer, wafer to wafer and susceptor to susceptor.

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Schunk Xycarb Technology is a long-standing supplier of SiC coated graphite susceptors and quartzware products in the semiconductor industry in OEM and the aftermarket. Schunk Xycarb Technology offers a complete package for ETCH, EPI, RTP, CVD and PVD systems.

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