EPI

Product name:
SiC coated graphite and quartz for Single Wafer and Batch EPI

Product description:
Xycarb Ceramics offers the complete package of consumables for EPI systems (like ASM Epsilion, AMAT Centura, barrel and pancake systems) including SiC coated graphite and quartz and cleaning and repair of quartz.

Product detail:
Complete package of consumables like Susceptors, Wafer lift pins, domes, chambers, blades, shafts, spiders.



Product name:
Quartz EPI Products

Product description:
Our experience in this area, our precision computer-controlled machining plus our advanced thermal forming and treatments enable us to deliver on high level requirements for production systems. Now and in the future.
We make extensive use of simulations to design out stresses in our quartz products long before entering production. Optimal surface treatments completely eliminate all risk of particle contamination during production.
In order to manufacture quartz-ware to the highest technical specifications, our production centres make widespread use of robotic manufacturing equipment, often designed in-house by our professionals. Our fully-automated quartz welders give reproducible, stress-free welds that are seamless and blemish free. Fire polishing is also fully automated to create highly uniform, virtually stress-free products.
Xycarb Ceramics offers flexibility in material choice and design in order to optimize the total cost of ownership of tools. Based on our extensive material knowledge and understanding of the tools and processes, we closely cooperate with customers to improve performance of the parts and reduce cost.
Our quartz products meet and exceed specification. Xycarb Ceramics offers direct replacement to OEM parts. Xycarb Ceramics offers custom design engineering in order to improve process, cost and yield.
Through the local repair service, Xycarb Ceramics is able to greatly extend the lifetime of quartzware, reducing costs and variability within the quartz inventory of the customer.

Product detail:
Complete package of consumables like domes, chambers, blades, shafts, spiders