CVD / PVD

CVD

Product name:
High Precision Parts made from Alumina, AlN, SiC, Quartz, Sapphire used in CVD Systems.

Product description:
Xycarb Ceramics offers a complete line of consumable parts for CVD systems such as AMAT and Novellus. We use High precision machining and tight Process controls to deliver the highest quality parts to the industry. Our Years of experience and High degree of Technical knowledge combine to offer parts and solutions that provide exceptional performance with low Cost of Ownership.

Product detail:
Complete package of consumables like Domes, Nozzles, Rings, Plates, Chamber inserts, Pins and Cover Plates.

PVD

Product name:
High Precision Parts made from Quartz (coated and uncoated) and Silicon for AMAT Endura PVD Systems.

Product description:
Quartz refurbishment, cleaning, surface texturing, Alumina Arc spray, Xirconium and Yttrium Plasma spray.

Product detail:
Complete package of consumables like pre clean bell jars, insulators, cover rings, antenna pins.